我们的残余气体分析仪是分析由真实泄漏、虚拟泄漏或腔壁放气所引起的系统气体负荷的有效工具，能够区分不同的气体种类、具备相当的灵敏度水平，以及能够检测内部或“虚拟”泄漏，并能对放气问题进行检测和分析。我们的真空规、变送器和控制器采用了多种压力测量技术，能在10E(-11)至1500 Torr 压力范围内可靠、精确和耐用的真空测量。
3 product series
Gas Analysis & Vacuum Measurement
Residual gas analyzer for precision fluid control and ultra-high-purity gas systems, 1-200 amu. Dual-filament ion source with anti-contamination quadrupole mass filter and Faraday cup detector for trace gas monitoring. Millisecond data acquisition with integrated central control platform.
View seriesGas Analysis & Vacuum Measurement
Residual gas analyzer for precision fluid control and ultra-high-purity gas systems, 1-300 amu. Dual-filament ion source with anti-contamination quadrupole mass filter and high-performance electron multiplier detector for trace gas detection.
View series
Gas Analysis & Vacuum Measurement
For vacuum system measurement requirements; configuration confirmed per project.
View series