Serving semiconductor and advanced manufacturing with precision gas flow control, measurement and analysis equipment, and customized engineering support from components to systems.
Zhejiang Hainar Precision Equipment Co., Ltd. (HNR) develops and manufactures precision gas flow control, measurement, analysis and high-purity gas delivery equipment for the semiconductor and electronics manufacturing industries. Integrating R&D, precision manufacturing, system integration, test & verification and technical support, HNR builds complete capabilities from components to systems around precision measurement and control.
Key products include thermal and differential-pressure mass flow controllers, mass flow meters, residual gas analyzers (RGA) and modular gas systems, covering flow, pressure, liquid vaporization, gas analysis and integrated gas systems (IGS), applicable to process gas delivery, thin-film deposition, vacuum processes, gas monitoring and equipment integration.
Guided by long-term engineering practice, HNR provides customized engineering support based on specific process and system requirements, helping equipment and process teams complete selection, integration and verification from process conditions — building stable, traceable and trustworthy gas control solutions.
Measurement · Control · Analysis · Connection
Product Directions
Organized by industry and operating conditions
Application Entry
Traceable documentation
Parameter Governance
Executed within confirmed scope
Project Boundaries
Selection support for PS300/PS500 and other products for process gas flow control and measurement.
For process and system pressure control; specific configurations confirmed against operating conditions.
Project-based selection support for vacuum chamber atmosphere analysis, residual gas monitoring and vacuum measurement.
For equipment and system connection, isolation and control; media, interfaces and configurations confirmed per project.
For multi-component gas mixing, delivery and system integration; composition and control configurations confirmed per project.
Products are organized by industry and process scenario: understand the application first, then match the most suitable configuration from the product lines - avoiding over- or under-specification from model-table selection and helping engineers move efficiently from requirement to solution.
Differential-pressure mass flow control (PS300/PS500), residual gas analysis (HMS-F/HMS-C), integrated gas systems and gas mixing (GMD) form a portfolio for gas control and atmosphere monitoring; GMD features and configurations are confirmed per project.
Product capability is built continuously through coordinated local R&D, manufacturing and supply; specific intellectual property and supply information is subject to company-confirmed documentation.
Key specifications, interface definitions and application boundaries are clearly presented. PS300/PS500 are calibrated with actual process gases; accuracy and response parameters follow product documentation for easy evaluation and selection.
Project communication covers selection, interfaces and joint commissioning; work items and response approach follow the confirmed project scope.
Tell us your media, flow range, vacuum level or pressure rating; application engineers will help chart a viable path.