PS500 Differential-Pressure Mass Flow Controller
Precision gas flow control for advanced semiconductor manufacturing. Measures differential pressure across a laminar flow element for high-sensitivity wide-range flow measurement. Low dead-volume piezoelectric metal diaphragm inlet valve with a 2 ms control cycle delivers fast response and high-resolution control.
Key capabilities
- Flow Range
- ≤ 0.8 秒
- Accuracy
- ±1.0% S.P. (20-100% F.S.), ±0.2% F.S. (1-20% F.S.)
- Response Time
- 10SCCM - 50SLM
- Leak Rate
- ≤ 5×10⁻¹¹ Pa·m³/s (He)
- 3D Gas Property Database
- Optimized laminar microchannel structure with data-driven modeling across pressures and temperatures; automatic compensation for temperature or outlet pressure changes
- Simplified Gas Supply
- Downstream measurement with pressure-fluctuation suppression maintains stable control; built-in inlet pressure sensor eliminates separate sensors
- Fast Response
- Response time ≤ 1 s for rapid adaptation to process gas changes
- High-Resolution Control
- 2 ms piezoelectric valve drive cycle for fine adjustment and high resolution
- Built-in Inlet Pressure Sensor
- Pressure displayed locally or via digital communication
The PS500 is designed for precision gas flow control in advanced semiconductor manufacturing processes requiring high flow stability, fast response, and precise control.
Differential pressure across a laminar flow element enables high-sensitivity flow measurement over a wide range. A low dead-volume piezoelectric metal diaphragm inlet valve rapidly adjusts flow while reducing the impact of supply pressure fluctuations. A 3D gas property database built from actual process gas calibration, combined with 2 ms piezoelectric valve drive, delivers fast response, fine adjustment, and high-resolution control.
Measurement downstream of the control valve with a pressure-fluctuation suppression algorithm maintains stable control during supply pressure changes. The built-in inlet pressure sensor displays locally or via digital communication, simplifying the gas supply architecture.
Detailed specifications
General Specifications
| Series | 气体可配置可选多气体多量程功能 |
|---|---|
| Full Scale (Catalog) | 10SCCM - 50SLM (N2 等效流量) |
| Flow Control Range | 1-100% F.S. (0.5-100% F.S. 可选) |
| 响应时间 | < 0.8 秒 |
| Gas | ±1.0% S.P. (20-100% F.S.), ±0.2% F.S. (1-20% F.S.) |
| Full Scale (Datasheet) | ±0.3% S.P. (20-100% F.S.), ±0.06% F.S. (1-20% F.S.) |
| 压力不敏感性 | 具有 |
| 温度敏感度（自 25℃） | ±0.05% S.P./℃ (20-100% F.S.), ±0.01% F.S./℃ (1-20% F.S.) |
| 安装方向 | 任意 |
Pressure & Temperature
| 耐压等级 | 1000 kPa(A) |
|---|---|
| 入口工作压力 | 240-450 kPa(A) |
| Inlet Pressure Accuracy | ±10 kPa (0-1000 kPa(A)) |
| Working Differential Pressure | ≥ 240 kPa(D) |
| Operating Temperature | 15-45 ℃ |
| 温度精度 | ±1 ℃ |
| Temperature Sensitivity (from 25℃) | 0-80 ℃ |
Accuracy & Performance
| Flow Accuracy (25℃) | SUS 316L |
|---|---|
| Repeatability | 全金属密封 |
| Response Speed | 堆叠式压电陶瓷阀，常闭，带前馈压力传感器 |
| 阀片泄漏 | ＜ 1% F.S. |
| 泄漏率 | ≤ 5×10⁻¹¹ Pa·m³/s (He) |
| 工艺连接 | 1.125" IGS |
| 防护等级 | IP40 |
Interface & Electrical
| Power Supply | +9~36 VDC, 最大 1A |
|---|---|
| Communication Mode | 模拟信号, RS-485, DeviceNet, EtherCAT |
| Connectors | 9-pin D-Sub (模拟和供电), RJ-45 (RS-485), 5-pin M12 (DeviceNet), 5-pin M8 和 RJ-45 (EtherCAT) |
Selection Support
Share your application scenario, media or sample, interface and control requirements; we will help verify viable configurations against published documentation.
可核对的已发布信息：3D Gas Property Database、Simplified Gas Supply、Fast Response、High-Resolution Control
Downloads
- Download
PS500 Datasheet
Datasheet · V1 · Chinese · PDF · 2.2 MB
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