Photovoltaic

New energy processes span material preparation, thin-film deposition and system trials, so gas measurement and control solutions must adapt to each process boundary.

Research and laboratory environments demand both breadth and depth in gas control and vacuum analysis. A residual gas analyzer (RGA) is a quadrupole mass spectrometer that ionizes gas molecules and separates them by mass-to-charge ratio, enabling ppm- to ppb-level qualitative and quantitative analysis of residual gases — a standard tool in vacuum science and surface science.

Key RGA applications include vacuum quality monitoring, leak detection, and outgassing studies: monitoring residual gas in UHV instruments (surface analysis, accelerators, SEM, spacecraft chambers), locating micron-scale leaks with helium tracer gas down to ~10⁻¹³ Pa·m³/s, and measuring temperature-programmed outgassing and permeability. Signature mass peaks — water at mass 18, nitrogen at 28, oxygen at 32 — quickly reveal background and sealing state.

Quadrupole RGAs typically operate below 10⁻⁴ Torr. With Faraday-cup or electron-multiplier detectors, detection limits reach ~5×10⁻¹¹ and ~5×10⁻¹⁴ Torr respectively, spanning more than six orders of dynamic range. Tungsten or yttria-coated iridium filaments (often dual) extend lifetime.

Beyond vacuum analysis, labs rely heavily on mass flow controllers for precise gas blending: mixture calibration, reaction gas setup, atmosphere protection, and parametric experiments all need stable, repeatable delivery per channel. Digital communication and auto-blending let complex multi-channel supplies be programmed from a host.

HNR serves research institutes and universities with residual gas analysis, gas mixing, mass flow control, and vacuum monitoring products, helping teams achieve reproducible conditions and reliable diagnostic data.