TE100 Thermal Mass Flow Controller
Economical mass flow controller using capillary thermal-differential sensing. Measurement accuracy is independent of temperature and pressure. 316L stainless steel body with maximum working pressure of 450 kPa and traditional solenoid proportional valve - the best solution for cost-sensitive applications.
Key capabilities
- Inlet Pressure
- ≤ 450 kPa(G)
- Control Range
- 2-100% F.S.
- Accuracy
- ±1.0% S.P. (30-100% F.S.), ±0.3% F.S. (2-30% F.S.)
- Response
- ≤ 1 秒
- Capillary Thermal Sensing
- Measurement accuracy independent of temperature and pressure
- 316L Stainless Steel Body
- Up to 450 kPa working pressure, corrosion resistant
- Solenoid Proportional Valve
- Traditional control approach, best for cost-sensitive applications
- Protection Circuits
- Surge suppression and overvoltage/overcurrent protection on electrical interface
- Multiple Protocols
- Digital I/O with multiple communication protocols, analog compatible
The TE100 series uses capillary thermal-differential sensing, with measurement accuracy independent of temperature and pressure. The 316L stainless steel body supports a maximum working pressure of 450 kPa.
Traditional solenoid proportional valve control makes it the best solution for cost-sensitive applications. The newly designed digital measurement and control circuit supports multiple communication protocols with analog compatibility; surge suppression and overvoltage/overcurrent protection circuits ensure stable and reliable operation.
Detailed specifications
General Specifications
| Model | 可配置可选多气体多量程功能 |
|---|---|
| 满量程流量 | 5SCCM-200SLM (N2 等效流量) |
| Flow Control Range | 2-100% F.S. |
| 响应时间 | < 1 秒 |
| 准确度 | ±1.0% S.P. (30-100% F.S.), ±0.3% F.S. (1-30% F.S.) |
| 直线性 | ±0.5% F.S. |
| 重复性 | ≤ ±0.2% F.S. |
Accuracy & Performance
| Repeatability | 1000 kPa(A) |
|---|---|
| 入口工作压力 | ≤ 450 kPa(G) |
| Flow Accuracy (25℃) | ≤ 300 kPa(D) |
| 工作温度 | 5-50 ℃ |
Valve & Sealing
| 接液材质 | SUS 316L |
|---|---|
| Leak Rate | 全金属密封 |
| Valve Type | 比例电磁阀 |
| Shut-Off Leak | < 2% F.S. |
| 泄漏率 | ≤ 5×10⁻¹² Pa·m³/s (He) |
| 工艺连接 | 1/4" VCR, 1/2" VCR, 1/4" 卡套, 3/8" 卡套, 1/2" 卡套 |
| 防护等级 | IP40 |
Ordering (Range)
| Range Specifications | +9~36 VDC, 最大 1A |
|---|---|
| 通信协议 | 模拟信号, RS-485, 可选 DeviceNet, EtherCAT |
| 电气接口 | 9-pin D-Sub (模拟和供电), RJ-45 (RS-485), 5-pin M12 (DeviceNet), 5-pin M8 和 RJ-45 (EtherCAT) |
Selection Support
Share your application scenario, media or sample, interface and control requirements; we will help verify viable configurations against published documentation.
可核对的已发布信息：Capillary Thermal Sensing、316L Stainless Steel Body、Solenoid Proportional Valve、Protection Circuits
Downloads
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