HMS-C Residual Gas Analyzer (Faraday Cup)
Residual gas analyzer for precision fluid control and ultra-high-purity gas systems, 1-200 amu. Dual-filament ion source with anti-contamination quadrupole mass filter and Faraday cup detector for trace gas monitoring. Millisecond data acquisition with integrated central control platform.
Key capabilities
- Mass Range
- 1-200 amu
- Detector
- Faraday Cup
- Resolution
- < 1 amu
- Response
- ≤ 0.1 ms
- Dual-Filament Ion Source
- Reduced replacement frequency, lower long-term maintenance cost
- Faraday Cup Detector
- Stable, reliable trace gas monitoring
- Anti-Contamination Quadrupole
- 316L high-purity stainless steel / high-purity molybdenum
- High-Speed Acquisition
- Millisecond-level data acquisition via integrated circuit technology
- Differential Vacuum System
- Turbomolecular pump, backing pump and vacuum needle valve for differential vacuum control
The HMS series residual gas analyzer serves precision fluid control and ultra-high-purity gas systems, providing fast and reliable gas analysis and monitoring for advanced semiconductor processes.
The dual-filament ion source reduces replacement frequency and maintenance cost. The Faraday cup detector is suitable for trace gas monitoring. Combined with high-speed signal acquisition and real-time data analysis, it provides timely feedback on gas conditions.
Enables in-situ monitoring of semiconductor processes: air leaks, process gas concentration changes, hydrocarbons, and other trace contaminants. The differential vacuum system (turbomolecular pump, backing pump, and vacuum needle valve) provides a stable vacuum environment; standard DN40KF flange with optional DN63CF and other interfaces.
Detailed specifications
General Specifications
| Product Name | Residual Gas Analyzer HMS-C |
|---|---|
| Series / Model | HMS / 100, 200 |
| Mass Range | 1~100 amu (100) / 1~200 amu (200) |
| Detector | Faraday Cup |
Performance
| Mass Resolution | < 1 amu |
|---|---|
| Mass Stability | 0.1 amu/24 h |
| Maximum Working Pressure | ≤ 1×10⁻³ mbar (0.1 Pa) |
| Response Time | ≤ 0.1 ms |
| Working Temperature | 5~50 ℃ |
Structure & Materials
| Ion Source | Dual-filament open ion source |
|---|---|
| Filament Type | Pure tungsten / yttria-coated iridium |
| Quadrupole Material | 316L high-purity stainless steel / high-purity molybdenum |
Interface & Electrical
| Input Voltage | AC 220 V |
|---|---|
| Communication | RS-232, RS-485, Ethernet, standard I/O, USB |
| Control Software | HMS 1.0 |
| Weight | ≤ 2 kg |
Selection Support
Share your application scenario, media or sample, interface and control requirements; we will help verify viable configurations against published documentation.
可核对的已发布信息：Dual-Filament Ion Source、Faraday Cup Detector、Anti-Contamination Quadrupole、High-Speed Acquisition
Downloads
- Download
HMS Residual Gas Analyzer Datasheet
Datasheet · V1 · Chinese · PDF · 1.1 MB
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