HMS-F Residual Gas Analyzer (Electron Multiplier)
Residual gas analyzer for precision fluid control and ultra-high-purity gas systems, 1-300 amu. Dual-filament ion source with anti-contamination quadrupole mass filter and high-performance electron multiplier detector for trace gas detection.
Key capabilities
- Mass Range
- 1-300 amu
- Detector
- Electron Multiplier
- Resolution
- < 1 amu
- Stability
- 0.1 amu/24h
- Dual-Filament Ion Source
- Reduced replacement frequency, lower long-term maintenance cost
- Electron Multiplier Detector
- High sensitivity for trace gas detection
- Anti-Contamination Quadrupole
- 316L high-purity stainless steel / high-purity molybdenum
- High-Speed Acquisition
- Millisecond-level data acquisition via integrated circuit technology
- Differential Vacuum System
- Turbomolecular pump, backing pump and vacuum needle valve for differential vacuum control
The HMS series residual gas analyzer serves precision fluid control and ultra-high-purity gas systems, providing fast and reliable gas analysis and monitoring for advanced semiconductor processes.
The dual-filament ion source with anti-contamination quadrupole mass filter, combined with a high-performance electron multiplier detector, is ideal for trace gas detection, supporting sample introduction from low to high vacuum.
Independently designed and developed based on the domestic supply chain with full intellectual property, enhancing supply stability and security. Long-life key components reduce vacuum module replacement and maintenance downtime.
Detailed specifications
General Specifications
| Product Name | Residual Gas Analyzer HMS-F |
|---|---|
| Series / Model | HMS / 100, 200, 300 |
| Mass Range | 1~100 amu (100) / 1~200 amu (200) / 1~300 amu (300) |
| Detector | High-performance electron multiplier |
Performance
| Mass Resolution | < 1 amu |
|---|---|
| Mass Stability | 0.1 amu/24 h |
| Maximum Working Pressure | ≤ 1×10⁻³ mbar (0.1 Pa) |
| Response Time | ≤ 0.1 ms |
| Working Temperature | 5~50 ℃ |
Structure & Materials
| Ion Source | Dual-filament open ion source |
|---|---|
| Filament Type | Pure tungsten / yttria-coated iridium |
| Quadrupole Material | 316L high-purity stainless steel / high-purity molybdenum |
Interface & Electrical
| Input Voltage | AC 220 V |
|---|---|
| Communication | RS-232, RS-485, Ethernet, standard I/O, USB |
| Control Software | HMS 1.0 |
| Weight | ≤ 2 kg |
Selection Support
Share your application scenario, media or sample, interface and control requirements; we will help verify viable configurations against published documentation.
可核对的已发布信息：Dual-Filament Ion Source、Electron Multiplier Detector、Anti-Contamination Quadrupole、High-Speed Acquisition
Downloads
- Download
HMS Residual Gas Analyzer Datasheet
Datasheet · V1 · Chinese · PDF · 1.1 MB
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Residual gas analyzer for precision fluid control and ultra-high-purity gas systems, 1-200 amu. Dual-filament ion source with anti-contamination quadrupole mass filter and Faraday cup detector for trace gas monitoring. Millisecond data acquisition with integrated central control platform.
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